Hitachi S-4800 FESEM

With a cold field emission electron source for high resolution, ExB in-lens filter, our Hitachi S-4800 field emission scanning electron microscope is an extremely powerful and flexible tool.

The Hitachi S-4800 SEM at the AMF

  • 0.5 kV to 30 kV accelerating voltage
  • 1 nm resolution at 15 kV, 1.4 nm at 1 kV
  • Magnification from 30x to 800,000x
  • Maximum specimen size = 100 mm
  • Super ExB filter technology
  • Dry vacuum system
  • X+Y motorized eucentric stage with trackball interface (tilt and Z by manual control)
  • Ring-type YAG backscatter detector
  • Bruker Quantax EDS System for X-ray spectroscopy.