Nanofabrication Training Workshop, May 2015

CAMTEC offers the "Nanofabrication Training Workshop" as part of our graduate student training program. The intent of the workshop is to train CAMTEC faculty, students and staff to become capable users of the electron beam lithography (EBL), the focused ion beam (FIB) microscopy and the scanning electron microscopy (SEM).

The field emission SEM is a high-resolution system for imaging nanostructures, semiconductors and biological materials. The FIB is a technique used for site-specific analysis, deposition, and ablation of materials.  Materials are sputtered away with nanometer accuracy to generate patterns.  Materials can also be cutted, welded and transferred using the FIB. EBL is a technique for rapid prototyping of structures and devices. It combines the flexibility of FIB with the speed of photolithography but with higher resolution.

Fees:  The registration fee for the NanoFab workshop will be $390/student. Maximum number of participants per workshop is six.

For your information, the individual training costs for each of the instruments are:

SEM workshop 1.5 days - $175

FIB workshop 3 days training - $450;

EBL workshop 2 days - $350.

The CAMTEC Nanofabrication workshops will tentatively be offered three times a year: January, May and October.

To apply use the on-line training application.

CAMTEC Nanofabrication Workshop - Schedule

Monday, May 25

10 am – 10:30 am Introduction and assignments  

 All Groups 1, 2

Tuesday, May 26

9:30 – 10:45 am SEM Introduction

 All Groups 1, 2

11:00 - 11:45 am Image analysis and post production

 All Groups 1, 2

1:40 – 2:40 pm FIB introduction

 All Groups 1, 2

3:00 – 3.40 pm EBL Introduction

 All Groups 1, 2

Wednesday, May 27

9:00 am – 12:00 pm

 Group 1 SEM demo and hands on

1:00 – 4:30 pm 

 Group 2 SEM demo and hands on

Thursday, May 28

9:00 am – 12:00 pm

 Group 2 EBL demo/hands on

1:30 – 3:30 pm

Friday, May 29

9:00 am – 1:00 pm 

 Group 1 EBL demo/hands on

One-on-one with their own specimen (if available) will be arranged for the following week. Half a day for sem, 2 days for fib and half a day for ebl per participant.