UVic Nanofabrication Facility

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Raith 50 Electron Beam Lithography System

Raith 50 Electron Beam Lithography System

The electron beam lithograpy (EBL) system allows users to pattern structures with submicron resolution in electron sensitive resists.

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Electron Beam Evaporator

Electron Beam Evaporator

The electron beam evaporator is used for making thin metallic and dielectric films. 

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Variable angle spectral elipsometer (VASE)

Variable angle spectral elipsometer (VASE)

The spectral elipsometer allows users to determine film thicknesses with sub-nanoameter precision.  Single thin films, or multi-layer films can be analyzed provided that the films are not completely opaque. 

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Student completing a lift-off process

Student completing a lift-off process

Often the final step in sample fabrication is to remove the excess material deposited onto the resist.  The clean room provides a fume hood in a class 100 environment for just this purpose.

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UVic Nanofabrication Facility (Nanofab)

Welcome to the Nanofabrication Facility (Nanofab), an open user facility located in the basement of the Elliott building at the University of Victoria in beautiful British Columbia. We are one of the core labs of the Centre for Advanced Materials and Related Technology (CAMTEC).

The Nanofab is dedicated to the world of small scale fabrication, from millimeter sized scales, for electrical contacts or optical gratings, to nanometer sized scales, for photonic devices or terahertz electronics. Users from the university community, academia, or industry are welcome to use the equipment. Don't have time? Not a problem, we can arrange to do your fabrication for you.

Where to start

Have an idea for a project? Need something fabricated on our scale?  to discuss the details of the project and how we can help make the project work. Project details are always kept confidential.