Nanofabrication Training Workshop

Next Session Starting: Monday, October 16

As a part of graduate student training programs, CAMTEC offers the "Nanofabrication Training Workshop" at the Advanced Microscopy Facility and UVic NanoFab Lab three times a year. The intent of the workshop is to train CAMTEC graduate students to become Highly Qualified Personnel (HQP) in the nanofabrication techniques such as electron beam lithography (EBL), focused ion beam (FIB) lithography and scanning electron microscope (SEM).

The FIB lithography is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. Material is sputtered away or welded together with nanometer accuracy to a vector or bitmap pattern. EBL is a technique for rapid prototyping of structures and devices. It combines the flexibility of FIB with the speed of lithography at a larger scale than FIB. Electron sensitive materials are used as a mask and when exposed to an electron beam can be developed in the same manner as photolithography but with higher resolution.

The individual training costs are: SEM workshop 1.5 days is $203, FIB workshop 2 days training $485, EBL workshop 1 day is $350. Total $1038.

CAMTEC will subsidise the cost of the Nanofabrication Workshop so that the fee to supervisors will be $400.

TO APPLY:  Please use the on-line training application.

Workshop Timetable